JPS6388635U - - Google Patents
Info
- Publication number
- JPS6388635U JPS6388635U JP18127386U JP18127386U JPS6388635U JP S6388635 U JPS6388635 U JP S6388635U JP 18127386 U JP18127386 U JP 18127386U JP 18127386 U JP18127386 U JP 18127386U JP S6388635 U JPS6388635 U JP S6388635U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- box body
- substrate storage
- magazine
- multiple stages
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 239000011295 pitch Substances 0.000 claims 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18127386U JPS6388635U (en]) | 1986-11-25 | 1986-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18127386U JPS6388635U (en]) | 1986-11-25 | 1986-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6388635U true JPS6388635U (en]) | 1988-06-09 |
Family
ID=31125990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18127386U Pending JPS6388635U (en]) | 1986-11-25 | 1986-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6388635U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017038013A (ja) * | 2015-08-12 | 2017-02-16 | 株式会社ディスコ | 収容カセット |
-
1986
- 1986-11-25 JP JP18127386U patent/JPS6388635U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017038013A (ja) * | 2015-08-12 | 2017-02-16 | 株式会社ディスコ | 収容カセット |
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